3/29/2011	7:06:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/29/2011	7:06:05 PM	Recipe started at 7:06 PM
3/29/2011	7:06:05 PM	Helium valve closed
3/29/2011	7:06:05 PM	H2 valve closed
3/29/2011	7:06:05 PM	BCl3 valve closed
3/29/2011	7:06:05 PM	PH3 valve closed
3/29/2011	7:06:05 PM	SiCl4 pre valve closed
3/29/2011	7:06:05 PM	SiCl4 post valve closed
3/29/2011	7:06:05 PM	Main Vac valve closed
3/29/2011	7:06:05 PM	Bypass valve closed
3/29/2011	7:06:05 PM	Bubbler valve closed
3/29/2011	7:06:05 PM	Helium MFC set to  0.000000
3/29/2011	7:06:05 PM	H2 MFC set to  0.000000
3/29/2011	7:06:05 PM	BCl3 MFC set to  0.000000
3/29/2011	7:06:05 PM	PHl3 MFC set to  0.000000
3/29/2011	7:06:05 PM	SiCl4 MFC set to  0.000000
3/29/2011	7:06:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2011	7:06:06 PM	Tube furnace set to 0
3/29/2011	7:06:06 PM	Run finished at 7:06 PM
3/29/2011	7:06:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/29/2011	7:08:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2011	7:08:52 PM	Recipe started at 7:08 PM
3/29/2011	7:08:52 PM	Helium valve closed
3/29/2011	7:08:52 PM	H2 valve closed
3/29/2011	7:08:52 PM	BCl3 valve closed
3/29/2011	7:08:52 PM	PH3 valve closed
3/29/2011	7:08:52 PM	SiCl4 pre valve closed
3/29/2011	7:08:52 PM	SiCl4 post valve closed
3/29/2011	7:08:52 PM	Main Vac valve closed
3/29/2011	7:08:52 PM	Bubbler valve closed
3/29/2011	7:08:52 PM	Bypass valve opened
3/29/2011	7:08:52 PM	Helium MFC set to  0.000000
3/29/2011	7:08:52 PM	H2 MFC set to  0.000000
3/29/2011	7:08:52 PM	BCl3 MFC set to  0.000000
3/29/2011	7:08:52 PM	PHl3 MFC set to  0.000000
3/29/2011	7:08:52 PM	SiCl4 MFC set to  0.000000
3/29/2011	7:08:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2011	7:08:52 PM	Tube furnace set to 0
3/29/2011	7:08:52 PM	Helium valve closed
3/29/2011	7:08:52 PM	H2 valve closed
3/29/2011	7:08:52 PM	BCl3 valve closed
3/29/2011	7:08:52 PM	PH3 valve closed
3/29/2011	7:08:52 PM	SiCl4 pre valve closed
3/29/2011	7:08:52 PM	SiCl4 post valve closed
3/29/2011	7:08:52 PM	Bubbler valve closed
3/29/2011	7:08:52 PM	Main Vac valve opened
3/29/2011	7:08:52 PM	Bypass valve opened
3/29/2011	7:08:52 PM	Helium MFC set to  0.000000
3/29/2011	7:08:52 PM	H2 MFC set to  0.000000
3/29/2011	7:08:52 PM	BCl3 MFC set to  0.000000
3/29/2011	7:08:52 PM	PHl3 MFC set to  0.000000
3/29/2011	7:08:52 PM	SiCl4 MFC set to  0.000000
3/29/2011	7:08:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2011	7:08:52 PM	Tube furnace set to 0
3/29/2011	7:08:53 PM	Run finished at 7:08 PM
3/29/2011	7:08:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
